US Patent Issued to Onto Innovation on March 17 for "Periodic-pattern background removal" (Minnesota, Florida, Massachusetts, Texas Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,579,633, issued on March 17, was assigned to Onto Innovation Inc. (Wilmington, Mass.).

"Periodic-pattern background removal" was invented by Roman S. Basistyy (Sunny Isles Beach, Fla.), Jin Ju (Edina, Minn.), Jian Ding (Methuen, Mass.) and Jatinder Dhaliwal (Plano, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various examples described herein include various mechanisms, techniques, and methods to subtract collected signals caused by a periodic pattern formed on substrates to enable a higher level of defect detection on substrates. Signals detected by various types of metrology and substrate-inspection systems that are caused by periodic pattern...