US Patent Issued to Onto Innovation on June 23 for "Front-to-back overlay (FTBO) standard" (New Hampshire, New Jersey, Massachusetts Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,730, issued on June 23, was assigned to Onto Innovation Inc. (Wilmington, Mass.).

"Front-to-back overlay (FTBO) standard" was invented by Keith F. Best (Andover, Mass.), Corey Robert Shay (Amherst, N.H.) and Jyr Hong Soo (Princeton, N.J.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various examples herein describe an apparatus and related method to calibrate two in-line lithographic tools used as part of in-line, panel-production equipment. The two lithographic tools are used to expose opposing sides of a panel or substrate, such as, for example, an Advanced Integrated Circuit Substrates (AICS) panel or another type of panel or substrate, such as ...