ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,490, issued on Aug. 18, was assigned to Onto Innovation Inc. (Wilmington, Mass.).
"System and method for performing characterization of a sample" was invented by Manjusha Mehendale (Morristown, N.J.), George Andrew Antonelli (Flanders, N.J.), Robin A. Mair (West Chicago, Ill.) and Priya Mukundhan (Lake Hopatcong, N.J.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An optical metrology device includes a selectable pump arm that is used to produce a transient response in the target sample and a probe arm and may be configured to perform static Magneto-Optic Kerr Effect (MOKE) measurements or ellipsometry measurements when the pump arm is not selected,...