ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,624, issued on Aug. 11, was assigned to OMNITRON SENSORS INC. (Los Angeles).
"Methods for fabrication of MEMS device" was invented by Trent Huang (Los Angeles).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for fabricating a micro-electromechanical system (MEMS) device is disclosed. A device layer, a handle layer and a buried oxide layer between the handle layer and the device wafer are formed. A top trench is created in a top surface of the device layer. An oxide layer is created over the top surface of the device layer and the top trench. The top of the device layer and the top trench is coated with a polysilicon layer. The oxid...