US Patent Issued to NuFlare Technology on Sept. 2 for "Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,828, issued on Sept. 2, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium" was invented by Hirofumi Morita (Setagaya-ku, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi charged particle beam apparatus irradiates a substrate placed on a stage with a multi charged particle beam through an illumination optical system including a plurality of components, and an objective lens successively. In one embodiment, an optical system adjustment method for the multi charged particle beam apparatus includes measuring positional ...