US Patent Issued to NuFlare Technology on Oct. 27 for "Blanking aperture array mechanism and writing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,776,467, issued on Oct. 27, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Blanking aperture array mechanism and writing apparatus" was invented by Toshiki Kimura (Yokohama, Japan), Yuichi Baba (Yokohama, Japan) and Hirofumi Morita (Setagaya-ku, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A blanking aperture array mechanism includes a blanking aperture array chip configured to include a plurality of blankers which, at incidence of multiple beams, individually switch a state between "beam ON" and "beam OFF" of the multiple beams, and a mounting substrate configured to support the blanking aperture array chip, and to include a power ...