US Patent Issued to NuFlare Technology on Jan. 27 for "Beam detector, multi charged particle beam irradiation apparatus, and beam detector adjustment method" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,160, issued on Jan. 27, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Beam detector, multi charged particle beam irradiation apparatus, and beam detector adjustment method" was invented by Yasutaka Sato (Hachioji, Japan) and Kiminobu Akeno (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment, a beam detector includes a first aperture substrate including a first passage hole smaller than a pitch between beams of a multi charged particle beam, a second aperture substrate including a second passage hole allowing one detection target beam which has passed through the first passage hole, and a sensor d...