US Patent Issued to NuFlare Technology on Dec. 2 for "Coverage calculating method, charged particle beam writing method, coverage calculating device, charged particle beam writing apparatus, and computer-readable storage medium" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,959, issued on Dec. 2, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Coverage calculating method, charged particle beam writing method, coverage calculating device, charged particle beam writing apparatus, and computer-readable storage medium" was invented by Kenichi Yasui (Kawasaki, Japan) and Yasuo Kato (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a coverage calculating method is for calculating a coverage of a pattern in each of pixel regions obtained by dividing a writing region onto which the pattern is to be written by irradiation with a charged particle beam. Each of the pixel regions has a p...