ALEXANDRIA, Va., May 12 -- United States Patent no. 12,625,094, issued on May 12, was assigned to Nuctech Co. Ltd. (Beijing) and Tsinghua University (Beijing).
"Inspection system and inspection method" was invented by Li Zhang (Beijing), Zhiqiang Chen (Beijing), Qingping Huang (Beijing), Hui Ding (Beijing), Yong Zhou (Beijing), Xin Jin (Beijing) and Liming Yao (Beijing).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are an inspection system and an inspection method, the inspection system includes: a carrying device (300); at least one ray source (100) each includes a separate housing (110) to define a vacuum space and target spots enclosed within the housing (110), and a detector assembly (200). The ...