US Patent Issued to Nuctech, Shenmutek, Tsinghua University on May 12 for "Method of manufacturing terahertz detection device, and detection apparatus" (Chinese Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,628,443, issued on May 12, was assigned to Nuctech Co. Ltd. (Beijing), Shenmutek Co. Ltd. (Beijing) and Tsinghua University (Beijing).

"Method of manufacturing terahertz detection device, and detection apparatus" was invented by Ziran Zhao (Beijing), Shoulu Jiang (Beijing) and Xuming Ma (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a method of manufacturing a terahertz detection device including detectors and lenses arranged in an array and a terahertz detection apparatus. An example method includes forming detectors in a first area of a first surface of a base substrate through a double-sided photoetching process to form a detecto...