US Patent Issued to NOVA on July 14 for "Time-domain optical metrology and inspection of semiconductor devices" (Israeli Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,964, issued on July 14, was assigned to NOVA LTD. (Rehovot, Israel).

"Time-domain optical metrology and inspection of semiconductor devices" was invented by Gilad Barak (Rehovot, Israel), Amir Sagiv (Rehovot, Israel), Yishai Schreiber (Rehovot, Israel), Jacob Ofek (Rehovot, Israel), Zvi Gorohovsky (Rehovot, Israel) and Daphna Peimer (Rehovot, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain repre...