ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,082, issued on Feb. 10, was assigned to Nova Ltd. (Rehovot, Israel).
"Combining physical modeling and machine learning" was invented by Barak Bringoltz (Rehovot, Israel), Ran Yacoby (Rehovot, Israel), Ofer Shlagman (Rehovot, Israel) and Boaz Sturlesi (Rehovot, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system and methods for OCD metrology are provided including receiving reference parameters, receiving multiple sets of measured scatterometric data, and receiving an optical model designed to generate one or more sets of model scatterometric data according to a set of pattern parameters, and training a machine learning model by applying, ...