US Patent Issued to Nova Engineering Films on Jan. 27 for "Depositing of material by spraying precursor using supercritical fluid" (California Inventor)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,707, issued on Jan. 27, was assigned to Nova Engineering Films Inc. (Los Altos Hills, Calif.).

"Depositing of material by spraying precursor using supercritical fluid" was invented by Sang In Lee (Los Altos Hills, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments relate to surface treating a substrate, spraying precursor onto the substrate using supercritical carrier fluid, and post-treating the substrate sprayed with the precursor to form a layer with nanometer thickness of material on the substrate. A spraying assembly for spraying the precursor includes one or more spraying modules and one or more radical injectors at one or more ...