US Patent Issued to NIKON on Sept. 15 for "Processing system and measurement member" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,734,612, issued on Sept. 15, was assigned to NIKON Corp. (Tokyo).

"Processing system and measurement member" was invented by Shigeki Egami (Tokyo) and Yosuke Tatsuzaki (Saitama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system is a processing system that is configured to process an object by irradiating the object with an energy beam, and includes: a placing apparatus on which the object is placed; an irradiation apparatus that is configured to irradiate the object with the energy beam; and a light reception apparatus that includes: a beam passing member having an attenuation area in which the energy beam is attenuated and a plu...