US Patent Issued to NIKON on Nov. 3 for "Exposure device" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,823, issued on Nov. 3, was assigned to NIKON Corp. (Tokyo).

"Exposure device" was invented by Masaki Kato (Yokohama, Japan), Yasushi Mizuno (Saitama, Japan) and Satoshi Kawado (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an exposure device that irradiates an object scanned in a scanning direction with light from a spatial light modulator to expose the object, the exposure device including an illumination unit that illuminates the spatial light modulator with illumination light, wherein the illumination unit includes an optical integrator into which the illumination light enters, and a dimming member that is disposed on an o...