US Patent Issued to NIKON on March 17 for "Exposure apparatus, exposure method, and flat panel display manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,651, issued on March 17, was assigned to NIKON Corp. (Tokyo).

"Exposure apparatus, exposure method, and flat panel display manufacturing method" was invented by Masaki Kato (Yokohama, Japan), Hitoshi Mizuno (Yokohama, Japan) and Yasushi Mizuno (Saitama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An exposure apparatus includes: an illumination optical system; a spatial light modulator; a projection optical system that illuminates an exposure target with light emitted from the spatial light modulator; and a stage where the exposure target is placed, wherein by the stage moving the exposure target in a predetermined scan direction, the light...