ALEXANDRIA, Va., April 7 -- United States Patent no. 12,594,628, issued on April 7, was assigned to NIKON Corp. (Tokyo).
"Beam processing apparatus" was invented by Tomoki Miyakawa (Kumagaya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A beam processing apparatus is a beam processing apparatus that irradiates a workpiece with a processing beam, and performs a removal processing of a first part of the workpiece by irradiating a first surface of the workpiece with the processing beam while moving an irradiation position of the processing beam along a first direction, and performs a removal processing of a second part of the workpiece by irradiating a second surface, which is formed at the workpiece by...