US Patent Issued to NGK INSULATORS on Sept. 8 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,425, issued on Sept. 8, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Mitsuru Kojima (Handa-City, Japan), Hiroshi Takebayashi (Handa-City, Japan) and Jyunya Waki (Handa-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface; a conductive base plate; a gas common passage provided inside the base plate; gas outlet passages provided to reach the wafer placement surface from the gas common passage; at least one gas inlet passage provided to communicate with the ga...