ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,344, issued on Oct. 20, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).
"Wafer placement table" was invented by Hiroya Sugimoto (Chiryu-City, Japan) and Masaki Ishikawa (Handa-City, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic base having a wafer placement surface; resistance heating elements buried in the ceramic base; jumper layers having a planar shape and provided in a different layer from the resistance heating elements; an inner via connecting the jumper layer and an end of the resistance heating element; and a feed via connected to the jumper layer, wherein each of the resistance he...