US Patent Issued to NGK INSULATORS on Oct. 20 for "Focus ring placement table" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,837, issued on Oct. 20, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Focus ring placement table" was invented by Seiya Inoue (Handa-City, Japan) and Tatsuya Kuno (Nagoya-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A focus ring placement table includes an annular ceramic heater on which a focus ring is placed, a metal base, an adhesive element bonding the metal base and the ceramic heater, an inner-peripheral-side protective element disposed between the metal base and the ceramic heater and bonded to an inner peripheral portion of the adhesive element, and an outer-peripheral-side protective element disposed between the m...