US Patent Issued to NGK INSULATORS on March 31 for "EUV transmissive membrane" (Japanese Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,172, issued on March 31, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"EUV transmissive membrane" was invented by Toshikatsu Kashiwaya (Inazawa-City, Japan), Atsuo Kondo (Komaki-City, Japan), Hiroki Chaen (Yokohama-City, Japan) and Takashi Tanimura (Handa-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer."

The patent was filed on Feb. 24, 2023, under Application No. 18/173,955.

*For further information, including images, charts and table...