US Patent Issued to NGK INSULATORS on June 23 for "Wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,174, issued on June 23, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Wafer placement table" was invented by Seiya Inoue (Handa-City, Japan) and Tatsuya Kuno (Nagoya-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic substrate having a wafer placement surface on an upper surface thereof and containing an electrode therein; a conductive substrate disposed adjacent to a lower surface of the ceramic substrate, serving also as a plasma generating electrode, and having the same diameter as the ceramic substrate; a support substrate disposed adjacent to a lower surface of the conductive substrate,...