US Patent Issued to NGK INSULATORS on June 23 for "EUV transmissive film" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,706, issued on June 23, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"EUV transmissive film" was invented by Toshikatsu Kashiwaya (Inazawa-City, Japan), Atsuo Kondo (Okazaki-City, Japan), Hiroki Chaen (Yokohama-City, Japan), Takashi Tanimura (Handa-City, Japan) and Naoki Goriki (Kasugai-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 micro metre and a protective layer that covers at least one side of the main layer and has an I...