US Patent Issued to NGK INSULATORS on June 2 for "Wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,646,691, issued on June 2, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Wafer placement table" was invented by Hiroshi Takebayashi (Handa-City, Japan), Tatsuya Kuno (Nagoya-City, Japan) and Seiya Inoue (Handa-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic base, a cooling base, and a bonding layer. The ceramic base includes an outer peripheral part having an annular focus ring placement surface on an outer peripheral side of a central part having a circular wafer placement surface. The cooling base contains metal. The bonding layer bonds the ceramic base with the cooling base. The outer perip...