US Patent Issued to NGK INSULATORS on Feb. 3 for "Wafer placement table, and member for semiconductor manufacturing apparatus, using the same" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,543,527, issued on Feb. 3, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Wafer placement table, and member for semiconductor manufacturing apparatus, using the same" was invented by Seiya Inoue (Handa, Japan) and Tatsuya Kuno (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic base having a wafer placement surface on its top surface and incorporating an electrode, a cooling base provided on a bottom surface side of the ceramic base, and a refrigerant flow channel groove provided in the cooling base so as to open at a bottom surface of the cooling base."

The patent was filed on Sept. 1, 2022, u...