US Patent Issued to NGK INSULATORS on Feb. 24 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,013, issued on Feb. 24, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Seiya Inoue (Handa, Japan), Tatsuya Kuno (Nagoya, Japan) and Kanta Miyamoto (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes: a ceramic plate that has an upper surface including a wafer placement surface; a conductive base that is disposed on a lower surface of the ceramic plate; a first hole that extends through the ceramic plate; a second hole that extends through the conductive base; a porous plug that has an upper surface that is exp...