US Patent Issued to NGK INSULATORS on April 7 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,952, issued on April 7, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Seiya Inoue (Handa-City, Japan) and Tatsuya Kuno (Nagoya-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes a ceramic plate that has an upper surface including a reference surface on which multiple small projections for supporting a wafer are provided and that contains an electrostatic electrode; a plug arrangement hole that is provided in the ceramic plate; an electrostatic electrode opening portion that is provided at a position in the ele...