ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,682, issued on Nov. 3, was assigned to NEXTIN INC. (Gyeonggi-do, South Korea).
"Semiconductor manufacturing apparatus" was invented by Seoung-Ju Na (Gyeonggi-do, South Korea), Heung-Gyoon Park (Gyeonggi-do, South Korea), Keun Young Lim (Gyeonggi-do, South Korea) and Moo Hwan Kim (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing apparatus according to an embodiment of the present invention comprises: an ultraviolet generating part which is disposed in an ultraviolet generating chamber and generates ultraviolet rays of a target wavelength; a substrate driving part including a chuck which is disposed ...