US Patent Issued to Newport Fab on June 2 for "Tantalum nitride resistive heater for thermally-tunable photonics devices" (New Hampshire, Oregon, California Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,645,101, issued on June 2, was assigned to Newport Fab LLC (Newport Beach, Calif.).

"Tantalum nitride resistive heater for thermally-tunable photonics devices" was invented by Zhirong Tang (Lake Oswego, Ore.), Oleg Martynov (Lebanon, N.H.) and Edward Preisler (San Clemente, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor structure has a substrate and a thermally-tunable photonics device in or over the substrate. A tantalum nitride (TaN) resistive heater is over the substrate and proximate to the thermally-tunable photonics device. The TaN resistive heater is configured to tune the thermally-tunable photonics device."

The patent was...