US Patent Issued to Nearfield Instruments on Jan. 20 for "Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device" (Dutch, Russian Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,876, issued on Jan. 20, was assigned to Nearfield Instruments B.V. (Rotterdam, Netherlands).

"Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device" was invented by Hamed Sadeghian Marnani (Rotterdam, Netherlands) and Taras Piskunov (Schiedam, Russia).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical microscope (1) is provided herewith that is configured to provide an image in an image plane (3) of an object in an object plane (5). The optical microscope comprises in an order along an optical axis (6) from the object plane to the image plane, ...