ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,784,247, issued on Nov. 3, was assigned to Nanoverse Technologies Ltd (Beaverton, Ore.).
"Coordinated motion metrology with polar rose scanning" was invented by William Robertson (Beaverton, Ore.), Jeff Albelo (Beaverton, Ore.), Jared Richter (Beaverton, Ore.) and David Lord (Beaverton, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A novel BF-DF metrology that employs simultaneous, coordinated motion of the modulator wheel about its A axis, the BF-DF camera shuttering, the metrology chuck rotational (theta) motion about the C axis, and the metrology stage movement in the X, Y or both axes. This coordinated motion allows for a common frame of refere...