US Patent Issued to Movensys on Nov. 3 for "Automatic alignment of overhead transport vehicles to load ports of semiconductor fabrication tools" (Massachusetts Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,703, issued on Nov. 3, was assigned to Movensys Corp. (Somerville, Mass.).

"Automatic alignment of overhead transport vehicles to load ports of semiconductor fabrication tools" was invented by Kota Weaver (Allston, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for automatically aligning an overhead hoist transport (OHT) vehicle with a load port of a wafer fabrication tool during operation and at the installation phase of the equipment in a semiconductor fabrication facility are described herein. In one aspect, an alignment frame including a digital image capture device is mounted to a wafer-in-progress (WIP) carrying pod. A...