ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,432, issued on Feb. 24, was assigned to Motion Engine Inc. (Tokyo).
"Multi-mass MEMS motion sensor" was invented by Robert Mark Boysel (Delaware, Ohio) and Louis Ross (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electro-mechanical system (MEMS) motion sensor is provided that includes a MEMS wafer having a frame structure, a plurality of proof masses suspended to the frame structure, movable in three dimensions, and enclosed in one or more cavities. The MEMS sensor includes top and bottom cap wafers bonded to the MEMS wafer and top and bottom electrodes provided in the top and bottom cap wafers, forming capacitors with the plurality ...