ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,584, issued on April 14, was assigned to MITUTOYO Corp. (Kanagawa, Japan).
"Measurement method of surface shape and surface shape measurement device" was invented by Yumiko Mori (Kanagawa, Japan) and Yoshiaki Kato (Saitama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the su...