ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,091, issued on Feb. 3, was assigned to MITSUBISHI ELECTRIC Corp. (Tokyo).
"MEMS mirror device and distance measuring apparatus" was invented by Yoshiaki Hirata (Tokyo), Nobuaki Konno (Tokyo) and Yoshitaka Kajiyama (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "The MEMS mirror device includes a fixed member, a movable member rotatably coupled to the fixed member, a mirror, and a wire. The movable member includes a movable plate, a twist beam, and a meander beam. The meander beam is arranged along the twist beam. The mirror is formed on the movable plate. The wire extends from the movable plate to the fixed member. The wire is formed on the mean...