US Patent Issued to MILAEBO on June 2 for "Apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in the high temperature region and oxidation reaction in the low temperature region" (South Korean Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,644,179, issued on June 2, was assigned to MILAEBO Co. LTD. (Pyeongtaek-si, South Korea).

"Apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in the high temperature region and oxidation reaction in the low temperature region" was invented by Che Hoo Cho (Seoul, South Korea), Yeon Ju Lee (Hwaseong-si, South Korea), Ji Eun Han (Pyeongtaek-si, South Korea) and Sung Won Yoon (Siheung-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to an apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in a high-temperature region and an oxidation...