ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,515, issued on March 24, was assigned to Micron Technology Inc. (Boise, Idaho).
"Electronic devices comprising overlay marks" was invented by Rohit Kothari (Boise, Idaho), Harsh Narendrakumar Jain (Boise, Idaho), John D. Hopkins (Meridian, Idaho) and Xiaosong Zhang (Boise, Idaho).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic device comprising a multideck structure including a base stack of materials and one or more stacks of materials on the base stack of materials, at least one high aspect ratio feature in an array region in the base stack of materials and in the one or more stacks of materials, and overlay marks including an optical...