US Patent Issued to LOT CES, LOT VACUUM on July 14 for "Semiconductor manufacturing facility and method of operating the same" (South Korean Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,132, issued on July 14, was assigned to LOT CES Co. LTD. (Osan-si, South Korea) and LOT VACUUM Co. LTD. (Osan-si, South Korea).

"Semiconductor manufacturing facility and method of operating the same" was invented by Jin Ho Bae (Hwaseong-si, South Korea), Jong Taek Lee (Hwaseong-si, South Korea) and Min Jae Kim (Ansan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing facility includes: a process chamber in which an amorphous carbon layer (ACL) process in which amorphous carbon is deposited so that an ACL is formed, is performed; a vacuum pump in which a residual gas generated in the process chamber is discha...