US Patent Issued to Lawrence Semiconductor Research Laboratory on June 16 for "Micro-electro-mechanical systems (MEMS) having vertical stops and anchor structures" (Arizona Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,655,016, issued on June 16, was assigned to Lawrence Semiconductor Research Laboratory Inc. (Tempe, Ariz.).

"Micro-electro-mechanical systems (MEMS) having vertical stops and anchor structures" was invented by Bishnu Prasanna Gogoi (Scottsdale, Ariz.) and Chantal Arena (Mesa, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device is disclosed having one or more stops that is configured to limit movement of a moving mass. The one or more stops are formed in or on the semiconductor substrate. The one or more stops are attached to the moving mass. An intermediate layer is formed overlying the semiconductor substrate. A device layer is ...