ALEXANDRIA, Va., July 7 -- United States Patent no. 12,674,760, issued on July 7, was assigned to LASERTEC Corp. (Yokohama, Japan).
"Optical apparatus and focus correction method" was invented by Minoru Hosomi (Yokohama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An optical apparatus according to the present embodiment includes a detector for detecting detection light of illumination light reflected by a sample, an optical system for illuminating the sample with the illumination light and guiding the detection light reflected by the sample to the detector, a displacement measurement unit for measuring a displacement drift indicating the amount of drift in the position of an optical element included...