ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,448, issued on Sept. 8, was assigned to LAM RESEARCH AG (Villach, Austria).
"Apparatus for processing a wafer" was invented by Michael Brugger (Millstatt, Austria), Michael Puggl (Feistritz an der Drau, Austria) and Christian Putzi (Rosenbach, Austria).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a wafer, the apparatus comprising: a rotatable chuck for receiving and rotating a wafer; a heating device arranged to heat a wafer received by the rotatable chuck; a plate that is transparent to radiation emitted by the heating device; and a plate holder that holds an outer periphery of the plate, so as to mount the plate in the...