US Patent Issued to Lam Research on Sept. 15 for "In situ surface coating of process chamber" (Oregon Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,459, issued on Sept. 15, was assigned to Lam Research Corp. (Fremont, Calif.).

"In situ surface coating of process chamber" was invented by Jeffrey Womack (Lake Oswego, Ore.), Karl Frederick Leeser (West Linn, Ore.), Curtis W. Bailey (West Linn, Ore.), Keith Joseph Martin (Tualatin, Ore.), Rigel Martin Bruening (Sherwood, Ore.) and Nick Ray Linebarger Jr. (Beaverton, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reactor system comprises a process chamber, a gas inlet, and a dispenser. The dispenser is coupled to the gas inlet. The dispenser controls a gas flow from a vial to the gas inlet. The vial includes a coating material that, when rel...