US Patent Issued to LAM RESEARCH on Oct. 20 for "Compact gas separator devices co-located on substrate processing systems" (Oregon Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,766,461, issued on Oct. 20, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Compact gas separator devices co-located on substrate processing systems" was invented by Aleksey V. Altecor (Newberg, Ore.), Andrew Borth (Newberg, Ore.) and Chi-Jung Cheng (Wilsonville, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas separator device includes a first chamber including a first inlet to receive a gas mixture comprising first and second gases, and a first outlet. First and second Peltier devices are mounted to the first chamber to cool the first chamber to a first temperature. A second chamber is connected to the first chamber and includes a seco...