US Patent Issued to LAM RESEARCH on Nov. 3 for "Photoelectron assisted plasma ignition" (Oregon, Texas Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,785,043, issued on Nov. 3, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Photoelectron assisted plasma ignition" was invented by Lee Chen (Cedar Creek, Texas), Ramesh Chandrasekharan (Portland, Ore.), Shaun Tyler Smith (Portland, Ore.), Yukinori Sakiyama (West Linn, Ore.), Aaron Durbin (Portland, Ore.) and Jon Henri (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes a gas source, an RF source, and a light source. The gas source supplies a first gas to a process module of the substrate processing system. The RF source supplies RF power to the process module to generate plasma when the first gas ...