US Patent Issued to LAM RESEARCH on May 19 for "Pedestal for a substrate processing system" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. D1,126,934, issued on May 19, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Pedestal for a substrate processing system" was invented by Shreesha Yogish Rao (Fremont, Calif.), Krishna Birru (Fremont, Calif.), Vijay Kothapalli (Milpitas, Calif.), Xitong Chen (Fremont, Calif.) and Leonard Kho (San Francisco).

The patent was filed on July 7, 2023, under Application No. D/896,797.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=D1126934&OS=D1126934&RS=D1126934

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