US Patent Issued to Lam Research on May 12 for "Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes" (Oregon, California Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,624,455, issued on May 12, was assigned to Lam Research Corp. (Fremont, Calif.).

"Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes" was invented by Ramesh Chandrasekharan (Lake Oswego, Ore.), Michael Philip Roberts (Tigard, Ore.), Pulkit Agarwal (Beaverton, Ore.), Adrien Lavoie (Newberg, Ore.), Ravi Kumar (Beaverton, Ore.), Nuoya Yang (Portland, Ore.), Chan Myae Myae Soe (Santa Clara, Calif.) and Ashish Saurabh (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system is provided and includes a substrate support, a memory, and calibration, operating parameter, a...