US Patent Issued to Lam Research on May 12 for "Systems and methods for radiofrequency signal generator-based control of impedance matching system" (New York, California Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,626,887, issued on May 12, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for radiofrequency signal generator-based control of impedance matching system" was invented by Bradford J. Lyndaker (Lowville, N.Y.), Alexei Marakhtanov (Albany, Calif.), Felix Leib Kozakevich (Sunnyvale, Calif.) and David Hopkins (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An RF signal supply system for plasma generation includes an RF signal generator, an impedance matching system, and a control module. The RF signal generator includes a control system. The impedance matching system has an input connected to an output of the RF sig...