US Patent Issued to Lam Research on March 3 for "Wide-coverage edge ring for enhanced shielding in substrate processing systems" (California Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,566, issued on March 3, was assigned to Lam Research Corp. (Fremont, Calif.).

"Wide-coverage edge ring for enhanced shielding in substrate processing systems" was invented by Shang-I Chou (San Jose, Calif.), Dandan Wang (San Jose, Calif.), Giovanni Paolo Gajudo (Brentwood, Calif.), Gary Gragg (San Jose, Calif.) and Robert G. O'Neill (Hayward, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wide-coverage edge ring configured to be arranged above a bottom ring in a substrate processing chamber includes an upper surface, a lower surface that includes a lower surface step that extends downward from the lower surface and is configured to be recei...