US Patent Issued to LAM RESEARCH on March 17 for "Processing tool capable for forming carbon layers on substrates" (Oregon, Texas Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,875, issued on March 17, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Processing tool capable for forming carbon layers on substrates" was invented by Karl Frederick Leeser (West Linn, Ore.), Lee Chen (Cedar Creek, Texas) and Yukinori Sakiyama (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing tool capable of forming an carbon layer on a substrate by generating a plasma including carbon and non-carbon ions in a processing chamber, suspending the carbon and non-carbon ions in the processing chamber, removing mostly the suspended non-carbon ions from the processing chamber, and bombarding the substrate su...