US Patent Issued to Lam Research on June 23 for "Gas box with cross-flow exhaust system" (California Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,666,898, issued on June 23, was assigned to Lam Research Corp. (Fremont, Calif.).

"Gas box with cross-flow exhaust system" was invented by Evangelos T. Spyropoulos (San Jose, Calif.) and Iqbal A. Shareef (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas boxes for providing semiconductor processing gases are provided that incorporate a cross-flow ventilation system that may effectively remove potentially leaking gases from within the gas box at significantly lower volumetric flow rates than are possible with conventional gas box ventilation systems."

The patent was filed on Nov. 15, 2021, under Application No. 18/002,619.

*For further...